Advanced Energy’s New Power Meter Improves Accuracy and Performance in Precision RF Power Applications

DENVER, COLORADO – Media OutReach – 15 December 2021 – Advanced Energy (Nasdaq: AEIS) – a global leader in highly engineered,
precision power conversion, measurement and control solutions –
today announced the GEMINI™ 5540A RF (Radio Frequency) power meter. The new
power meter delivers highly accurate in-line RF power measurement in a flexible
and convenient integrated unit for applications requiring precision RF power
control in semiconductor, communication, industrial and medical markets. As the
leader in RF power solutions in the semiconductor industry, Advanced Energy continues
to bring new capabilities for improving plasma power controls and performance of
advanced etch and deposition processes.

Combining
sensor and meter capability into a single, easy-to-use instrument, the GEMINI
5540A measures at frequencies from 0.2 to 200 MHz and powers from 3 to 5,000 W
with 2-sigma accuracy of ±0.5% + 0.5 W. This integrated instrument enables
users to replace multiple instruments with a single meter for applications that
require precise measurement and control of RF power.

“In
demanding semiconductor processes such as high aspect ratio (HAR) plasma etch, precise
control and chamber-to-chamber matching of the RF system directly impact
process performance,” said Gerry Blumenstock, vice president, critical sensing and control
products at Advanced Energy. “With the new GEMINI 5540A, OEMs can
accurately calibrate the system and monitor RF power in real time, improving
the fidelity and consistency of leading-edge plasma-based processes.”

The
GEMINI 5540A incorporates a large, easy-to-read OLED digital display that
simultaneously shows forward and reverse power, voltage standing wave ratio
(VSWR) and frequency. It automatically senses frequency with no reconfiguration
required for forward and reverse power measurements. The meter reduces
calibration to every 12 months, compared to six months for conventional
instruments. It operates with a 5 V, 500 mA input supplied via a standard USB
2.0 port using either an external battery or AC power outlet and off-the-shelf
USB adapter.

In
addition to taking measurements directly, the meter can also be connected to a
PC for collection, storage and audit of data using Advanced Energy’s GEMINI
Tools data visualization software.

For detailed product information and technical
specifications, visit www.tegam.com/shop/rf-microwave/power-meters/no-product/gemini-5540a-rf-power-meter

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